标题:Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer
作者:Ge, YP[1];Guo, FM[1];Wang, WM[1];Yu, SX[1];Li, S[1];Zhu, ZQ[1];Lu, W[1]
作者全称:Ge, YP[1];Guo, FM[1];Wang, WM[1];Yu, SX[1];Li, S[1];Zhu, ZQ[1];Lu, W[1]
通讯作者:Fangmin, G.(fmguo@ee.ecnu.edu.cn)
通讯作者地址:Guo, FM (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.
出版年:2004
卷:5774
页码:515-518
关键词:CPW; Dielectric loss; Insertion loss; Microwave; MMIC; OPS; Polyimide; PS; Substrate
摘要:A low-loss microwave Coplanar Waveguides (CPW) was fabricated on Porous Silicon (PS) substrate oxidated and coated with polyimide. The high frequency 更多
收录类别:SCOPUS;CPCI-S;EI
资源类型:外文期刊论文;外文会议论文
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