标题:Optical properties of nanocrystalline silicon embedded in SiO2
作者:Ma, ZX[1,2]; Liao, XB[1,2]; Kong, GL[1,2]; Chu, JH[1,2]
作者全称:Ma, ZX[1,2]; Liao, XB[1,2]; Kong, GL[1,2]; Chu, JH[1,2]
通讯作者地址:Ma, ZX (reprint author), Chinese Acad Sci, Inst Semicond, Ctr Condensed Matter Phys, State Key Lab Surface Phys, Beijing 100083, Peoples R China.
出版年:1999
卷:42
期:9
页码:995-1002
关键词:nanocrystalline silicon; quantum confinement effect; Raman spectra;; absorption spectra; photoluminescence
摘要:Nanocrystalline silicon embedded SiO2 matrix has been formed by annealing the a-SiOx films fabricated by plasma enhanced chemical vapor deposition tec 更多
收录类别:SCIE
资源类型:外文期刊论文
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