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1. Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon SCOPUS CPCI-S EI

作者:Chen, Y;Guo, PS;Wang, LW

通讯作者:Wang, L.(lwwang@ee.ecnu.edn.cn)

通讯作者地址:Wang, LW (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Chen, Y; Guo, PS; Wang, LW]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,575-578

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

2. Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application SCOPUS CPCI-S EI

作者:Jiang, L;Shi, YL;Li, W;Ding, YF;Lai, ZS;Zhu, ZQ

通讯作者:Shi, Y.(ylshi@ee.ecnu.edu.cn)

通讯作者地址:Shi, YL (reprint author), E China Normal Univ, Dept Elect Sci & Technol, 3663 Zhongshan Rd N, Shanghai 200062, Peoples R China.

作者机构:[Jiang, L; Shi, YL; Li, W; Ding, YF; Lai, ZS; Zhu, ZQ]E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,587-590

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

3. Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer SCOPUS CPCI-S EI

作者:Ge, YP;Guo, FM;Wang, WM;Yu, SX;Li, S;Zhu, ZQ;Lu, W

通讯作者:Fangmin, G.(fmguo@ee.ecnu.edu.cn)

通讯作者地址:Guo, FM (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Ge, YP; Guo, FM; Wang, WM; Yu, SX; Li, S; Zhu, ZQ; Lu, W]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,515-518

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

4. Structural and electrical properties of high kappa Al2O3-ZrO2 gate dielectrics on SOI substrate SCOPUS CPCI-S EI

作者:Ding, YF;Ye, GS;Zhang, NL;Zhu, M;Lin, CL;Zhu, ZQ

通讯作者:Ding, Y.F.

通讯作者地址:Ding, YF (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Ding, YF; Ye, GS; Zhang, NL; Zhu, M; Lin, CL; Zhu, ZQ]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,646-650

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

5. Formation of the copper nano-particles in porous silicon by electroplating SCOPUS CPCI-S EI

作者:Feng, X;Xu, SH;Chen, SQ;Zhu, JZ;Zhu, ZQ;Lai, ZS

通讯作者:Feng, X.

通讯作者地址:Feng, X (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Feng, X; Xu, SH; Chen, SQ; Zhu, JZ; Zhu, ZQ; Lai, ZS]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,563-566

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

6. Failure analysis of MEMS RF cantilevered beam switch SCOPUS CPCI-S EI

作者:Guo, FM;Xu, X;Li, CS;Ge, YP;Yu, JG;Xin, PS;Zhu, RJ;Lai, ZS;Zhu, ZQ;Lu, W

通讯作者:Fangmin, G.(fmguo@ee.ecnu.edu.cn)

通讯作者地址:Guo, FM (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Guo, FM; Xu, X; Li, CS; Ge, YP; Yu, JG; Xin, PS; Zhu, RJ; Lai, ZS; Zhu, ZQ; Lu, W]E China Normal Univ, Dept Elect Engn, Shanghai 20 更多

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,506-509

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

7. Research for polyimide as a sacrificial layer in MEMS device SCOPUS CPCI-S EI

作者:Hu, ML;Chen, JJ;Lai, ZS;Mao, HB;Sheng, DX

通讯作者:Lai, Z.(zslai@ee.ecnu.edu.cn)

通讯作者地址:Lai, ZS (reprint author), E China Normal Univ, Dept Elect Sci & Technol, 3663 N Zhong Shan Rd, Shanghai 200062, Peoples R China.

作者机构:[Hu, ML; Chen, JJ; Lai, ZS; Mao, HB; Sheng, DX]E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,642-645

收录类别:SCOPUS;CPCI-S;EI

WOS被引:2

资源类型:外文期刊论文;外文会议论文

8. Index compatible design of multi-layer film for MEMS-type variable optical attenuator SCOPUS CPCI-S EI

作者:Peng, DY;Li, GD;Wang, LW;Lai, ZS

通讯作者:Peng, D.(dypeng@ee.ecnu.edu.cn)

通讯作者地址:Peng, DY (reprint author), E China Normal Univ, Sch Informat Sci & Technol, Shanghai 200062, Peoples R China.

作者机构:[Peng, DY; Li, GD; Wang, LW; Lai, ZS]E China Normal Univ, Sch Informat Sci & Technol, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,603-606

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

9. Mesoporous silica thin films prepared by argon plasma treatment of sol-gel-derived precursor SCOPUS CPCI-S EI

作者:Zhang, J;Palaniappan, A;Su, XD;Tay, FEH

通讯作者:Zhang, J.(jzhang@ee.ecnu.edu-cu)

通讯作者地址:Zhang, J (reprint author), E China Normal Univ, Dept Elect Sci & Technol, 3663 ZhongShan N Rd, Shanghai 200062, Peoples R China.

作者机构:[Zhang, J; Palaniappan, A; Su, XD; Tay, FEH]E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,291-295

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

10. Optimized inductor and low-pass filter with low substrate loss on OPS/PS interlayer SCOPUS SCIE CPCI-S EI

作者:Liu, Y;Shi, YL;Feng, X;Wang, Y;Chen, SQ;Li, XJ;Zhu, ZQ;Lai, ZS

通讯作者:Liu, Y.

通讯作者地址:Liu, Y (reprint author), E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China.

作者机构:[Liu, Y; Shi, YL; Feng, X; Wang, Y; Chen, SQ; Li, XJ; Zhu, ZQ; Lai, ZS]E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, P 更多

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,523-526

收录类别:SCOPUS;SCIE;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

11. Study on DC-contact MEMS switches SCOPUS CPCI-S EI

作者:Chen, JJ; Wei, HZ; Hu, ML; Lai, ZS

通讯作者:Chen, J.J.(YS02242010@student.ecnu.edu.cn)

通讯作者地址:Chen, JJ (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Chen, JJ; Wei, HZ; Hu, ML; Lai, ZS]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,591-594

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

12. Field emission behavior of GaN nanoparticles and nanobelts SCOPUS CPCI-S EI

作者:Yu, K;Zhang, YS;Luo, LQ;Zhu, ZQ

通讯作者:Zhu, Z.(zqzhu@ee.ecnu.edu.cn)

通讯作者地址:Zhu, ZQ (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Yu, K; Zhang, YS; Luo, LQ; Zhu, ZQ]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,353-356

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

13. Post-treating techniques of porous silicon thin film SCOPUS CPCI-S EI

作者:Zhu, ZQ;Long, YF;Chen, SQ;Yu, XW;Zhu, JX

通讯作者:Zhu, Z.(zqzhu@ee.ecnu.edu.cn)

通讯作者地址:Zhu, ZQ (reprint author), E China Normal Univ, Sch Informat Sci & Technol, Shanghai 200062, Peoples R China.

作者机构:[Zhu, ZQ; Long, YF; Chen, SQ; Yu, XW; Zhu, JX]E China Normal Univ, Sch Informat Sci & Technol, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,438-441

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

14. Transfer bonding of thick silicon nitride film via split of porous silicon SCOPUS CPCI-S EI

作者:Bao, XQ;Ding, YF;Chen, Y;Guo, PS;Shi, YL;Wang, LW;Lai, ZS

通讯作者:Wang, L.W.

通讯作者地址:Bao, XQ (reprint author), E China Normal Univ, Dept Elect, 3663 N Zhongshan Rd, Shanghai 200062, Peoples R China.

作者机构:[Bao, XQ; Ding, YF; Chen, Y; Guo, PS; Shi, YL; Wang, LW; Lai, ZS]E China Normal Univ, Dept Elect, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,579-582

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

15. High-isolation contact switch in MEMS phase shifter SCOPUS CPCI-S EI

作者:Li, W;Shi, YL;Qing, J;Jiang, L;Ren, Z;Xin, PS;Zhu, ZQ;Lai, ZS

通讯作者:Li, W.(winni.li@citiz.net)

通讯作者地址:Li, W (reprint author), E China Normal Univ, Dept EE, Shanghai 200062, Peoples R China.

作者机构:[Li, W; Shi, YL; Qing, J; Jiang, L; Ren, Z; Xin, PS; Zhu, ZQ; Lai, ZS]E China Normal Univ, Dept EE, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,547-550

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

16. Efficient field emission from porous silicon SCOPUS SCIE CPCI-S EI

作者:Zhang, YS;Yu, K;Luo, LQ;Zhu, ZQ

通讯作者:Zhu, Z.(zqzhu@ee.ecnu.edu.cn)

通讯作者地址:Zhu, ZQ (reprint author), E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

作者机构:[Zhang, YS; Yu, K; Luo, LQ; Zhu, ZQ]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,116-119

收录类别:SCOPUS;SCIE;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

17. Bond enhance of Hydroxyapatite/silicon layers by introducing a porous silicon interlayer SCOPUS CPCI-S EI

作者:Chen, SQ;Zhu, JZ;Zhan, J;Feng, X;Shi, L;Wang, XH;Luo, LQ;Zhu, ZQ

通讯作者:Zhu, Z.

通讯作者地址:Chen, SQ (reprint author), E China Normal Univ, Dept Elect Engn, 3663 Zhongshan N Rd, Shanghai 200062, Peoples R China.

作者机构:[Chen, SQ; Zhu, JZ; Zhan, J; Feng, X; Shi, L; Wang, XH; Luo, LQ; Zhu, ZQ]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples 更多

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,559-562

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

18. Selectively formation of porous silicon array using highly resistive SCOPUS CPCI-S EI

作者:Wang, XH;Chen, SQ;Zhang, J;Zhu, JZ;Zhu, ZQ

通讯作者:Wang, X.

通讯作者地址:Zhu, ZQ (reprint author), E China Normal Univ, Dept Elect Engn, 3663 N Zhongshan Rd, Shanghai 200062, Peoples R China.

作者机构:[Wang, XH; Chen, SQ; Zhang, J; Zhu, JZ; Zhu, ZQ]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,349-352

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

19. Porous silicon-based oligonucleotide chips SCOPUS CPCI-S EI

作者:Shao, L;Chen, SQ;Zhang, J;Zhu, JZ;Zhu, ZQ;Zhu, B

通讯作者:Zhu, Z.

通讯作者地址:Shao, L (reprint author), E China Normal Univ, Dept Elect Engn, 3663 Zhongshan N Rd, Shanghai 200062, Peoples R China.

作者机构:[Shao, L; Chen, SQ; Zhang, J; Zhu, JZ; Zhu, ZQ; Zhu, B]E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,535-538

收录类别:SCOPUS;CPCI-S;EI

资源类型:外文期刊论文;外文会议论文

20. Effect of high-energy ball milling on morphology and field emission properties of multi-walled carbon nanotubes SCOPUS CPCI-S

作者:Luo, LQ;Yu, K;Zhang, YS;Zhu, ZQ;Chen, SQ

通讯作者地址:Zhu, ZQ (reprint author), E China Normal Univ, Dept EE, Shanghai 200062, Peoples R China.

作者机构:[Luo, LQ; Yu, K; Zhang, YS; Zhu, ZQ; Chen, SQ]E China Normal Univ, Dept EE, Shanghai 200062, Peoples R China.

来源:FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2004,5774,120-123

收录类别:SCOPUS;CPCI-S

资源类型:外文期刊论文;外文会议论文

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